Refurbished Semiconductor Equipment

Refurbished equipment offers you the best of both worlds; it costs significantly less than new equipment but comes with operational, performance and time line guarantees in addition to long-term support so your risk is eliminated.

When Entrepix refurbishes a piece of equipment, we start by sourcing it from its original owner, then transport it to our facility. Once in-house we install and facilitize the tool and conduct a system baseline evaluation. We perform mechanical and electrical functionality testing and replace or repair any malfunctioning components.

Next we reconfigure the tool to the new owner specs, perform a thorough cleaning and cleansing of all processing surfaces, align the appropriate tool components and test or upgrade software as required. Following calibration to traceable standards we do a final system evaluation and quality assurance (QA) check, followed by system wafer handling marathon testing.

Once a system has passed our rigorous testing challenges it is prepped for shipping and sent to the new customer. We then install, qualify, and train onsite. Our refurbished systems come with a parts and labor warranty, and long-term applications support and parts and service contracts are also available.

Entrepix offers a full range of refurbished CMP and metrology equipment for sale. All refurbished equipment is guaranteed to meet OEM specifications and is backed by Entrepix' support.

Refurbished Metrology Equipment

• Film Thickness (dielectric and conductive)
• Profilometers
• Particle detection